Effects of Plasma-PH3 Passivation on Mobility Degradation Mechanisms o…
| 2012-03-08 | |
| S.A.B. Suleiman, H.J. Oh, Sungjoo Lee | |
| IEEE Transactions on Electron Devices | |
| 2.062 | |
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Volume 59, Issue 5, p. 1377, 2012
Paper & Patents
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