Gate-Leakage and Carrier-Transport Mechanisms for Plasma-PH3 Passivate…
| 2012-02-20 | |
| S. Sumarlina Azzah Bte, Sungjoo Lee | |
| Japanese Journal of Applied Physics | |
| 1.067 | |
관련링크
본문
Volume 51, Issue 2S, p. 02BF02, 2012
http://iopscience.iop.org/article/10.1143/JJAP.51.02BF02
http://iopscience.iop.org/article/10.1143/JJAP.51.02BF02