성균관대학교 이성주교수 연구실 (NDTL, Nanoscale Devices Technology Lab.) 

Paper & Patents

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Study on thermal stability of plasma-PH3 passivated HfAlO/In0.53Ga0.47…

2010-07-21
Sumarlina A.B.S, H. J. Oh and Sungjoo Lee
Electrochemical and Solid-State Letters
1.967

본문

Volume 13, Issue 9, p. H336, 2010
http://esl.ecsdl.org/content/13/10/H336